With the development of microfluidics applications, more and more designers require complex structures in the glass, for example the well in the channels as a mixer. Now we could customize such 2.5D structures small to 5microns with a flexible width/depth ratio, a well, groove, step, and arrays could be fabricated inside the chip. Besides, we also achieve multi glass layers bonding, the min thickness of middle glass could be 0.1mm, with this process, the user could get a vertical channel profile and complete optical class surface.